Gas Cylinder Bundle
Main Technical Parameters of the Gas Cylinder Bundle:
Manufacturer’s standard:
12 gas cylinder bundle (3 × 4),
16 gas cylinder bundle (4 × 4),
20 gas cylinder bundle (4 × 5)
Frame material:Hot-dip galvanized carbon steel, stainless steel
Piping material:316L EP (electropolished), 316 cold-rolled pickled tubing
Welding process:Fully automatic welding, argon arc welding (TIG)
Working pressure:20MPa, 30MPa
Filling media:High-purity gases, NF₃, F₂, N₂, SiH₄
Valve Installation and Inspection
• After polishing, the cylinders are placed in a clean room for inner wall polishing measurement and valve installation to prevent particles in the air from entering the cylinders.
• Gas pipelines and control panels in the factory are designed and constructed according to electronic specialty gas plant standards, using imported EP-grade pipeline-level valves.
• On-site testing uses 150bar/200bar 6N nitrogen with Swagelok SNOOP leak detection solution or He/N2 mixed gas for high-pressure helium leak detection.
• Multiple replacements and vacuum treatments are carried out with the following specifications: H2O < 0.1PPMV, O2 < 0.1PPMV, particles 0.1µm < 3 pieces/m³.
Cylinder Cleaning
• Cylinders are cleaned using 18MΩ deionized water under high-pressure cleaning at a constant temperature.
• Deoiling and defatting treatment
• Metal ion removal and acid pickling passivation
• Drying with ultra-pure N2 and nitrogen protection.
